Imec announced at SEMICON West that it has demonstrated concept and feasibility for pore-sealing low-k dielectrics in advanced interconnects. The method, based on the self-assembly of an organic monolayer, paves the way to scaling interconnects beyond N5.   Imec has developed a method to seal the pores of the low-k material with a monomolecular organic film. The method not only prevents diffusion of moisture and metal precursors into the low-k material, it also might provide an effective barri...